Argon inclusion in sputtered films and the effect of the gas on molybdenum field emitter arrays

Applied Physics Letters

Volumn 78, Issue 15, 2001, Pages 2151-2153

  Chalamala, Babu R ^a   Reuss, Robert H ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035831929     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1361281     Document Type: Article

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