Apparatus for quantitative analysis of residual gases in flat panel vacuum packages

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 2, 2000, Pages 343-348

  Chalamala, Babu R ^a   Uebelhoer, David ^a   Dean, Kenneth A ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS; CHEMICAL EQUIPMENT; ELECTRON TUBES; FLAT PANEL DISPLAYS; MASS SPECTROMETRY; NUMERICAL METHODS; PARTIAL PRESSURE; VACUUM;

FLAT PANEL VACUUM PACKAGES; GAS CELLS; GAS EXPANSION; QUADRUPOLE MASS SPECTROMETER; RESIDUAL GASES; TEST DEVICE; VACUUM ENVELOPES;

GASES;

EID: 0034156306     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582190     Document Type: Article

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