Residual gas effects on the emission characteristics of silicon field emitter arrays

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 2, 2000, Pages 948-951

  Gilkes, M J ^a   Nicolaescu, D ^b   Wilshaw, P R ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

^b ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; CARBON DIOXIDE; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRON EMISSION; METHANE; SEMICONDUCTING SILICON; VACUUM;

FIELD EMITTER ARRAYS (FEA); WORK FUNCTIONS;

FIELD EMISSION CATHODES;

EID: 0034156117     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591304     Document Type: Article

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