Apparatus for temperature programmed desorption studies of thin films

Review of Scientific Instruments

Volumn 71, Issue 1, 2000, Pages 320-321

  Chalamala, Babu R ^a   Uebelhoer, David ^a   Reuss, Robert H ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000474072     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1150201     Document Type: Letter

References (11)

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