Evidence for the precursors of nitrided silicon in the early stages of silicon oxynitridation in N2:N2O atmosphere

Applied Physics Letters

Volumn 79, Issue 15, 2001, Pages 2378-2380

  Cerofolini, G F ^a   Camalleri, M ^a   Galati, C ^a   Lorenti, S ^a   Renna, L ^a   Viscuso, O ^a   Condorelli, G G ^b   Fragala I L ^b  

^a STMICROELECTRONICS   (Italy)

^b UNIVERSITY OF CATANIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035828577     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1404133     Document Type: Article

References (14)

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