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Applied Physics Letters

Volumn 79, Issue 1, 2001, Pages 138-140

Air flow actuation of micromechanical oscillators

(3) Neuzil, P a Sridhar, U a Ilic, B b

a INSTITUTE OF MICROELECTRONICS (Singapore)

b Cornell University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035796643 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1381571 Document Type: Article

Times cited : (8)

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