Design of rotating MEMS tunable capacitors for use at RF and Microwave frequencies

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4593, Issue , 2001, Pages 186-197

  Wilson, John ^a   Bashirullah, Rizwan ^a   Nackashi, David ^a   Winick, David ^a   Duewer, Bruce ^a   Franzon, Paul D ^a  

^a North Carolina State University   (United States)

Author keywords

MEMS capacitors; Metallization; Microwave MEMS; RF MEMS; Rotating MEMS; Self masking; Stress; Varactors; Warpage

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; FREQUENCIES; MASKS; METALLIZING; MICROWAVES; POLYSILICON; STRESS ANALYSIS; TOPOLOGY; VARACTORS;

SELF-MASKING;

MICROELECTROMECHANICAL DEVICES;

EID: 0035773170     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.448850     Document Type: Conference Paper

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