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Volumn , Issue , 1999, Pages 67-
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MEMS for space applications
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
MICROELECTROMECHANICAL DEVICES;
MICROELECTRONICS;
MICROPROCESSOR CHIPS;
NANOTECHNOLOGY;
ABSTRACT ONLY;
MICROSPACECRAFT;
SILICON ON INSULATOR TECHNOLOGY;
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EID: 0033328587
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (5)
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References (0)
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