Electrostatic latch and release: A theoretical and empirical study

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 2000-AB, Issue , 2000, Pages 19-26

  O'Brien, Gary J ^a   Monk, David J ^b   Lin, Liwei ^c  

^a UNIVERSITY OF MICHIGAN   (United States)

^b MOTOROLA INC   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC FIELDS; ELECTROSTATIC ACTUATORS; ELECTROSTATIC FORCE; NANOCANTILEVERS;

ACTUATOR MODEL; BEAM DEFLECTION; BEAM THEORIES; CAPACITANCE MODELLING; EMPIRICAL STUDIES; MODEL USE; PULL-IN; THEORETICAL STUDY; THEORY MODEL; TIP DISPLACEMENT;

CANTILEVER BEAMS;

EID: 0010995938     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2000-1065     Document Type: Conference Paper

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