Micro stereo lithography and fabrication of 3D MEMS and their appliations

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4592, Issue , 2001, Pages 9-20

  Varadan, V K ^a   Varadan, V V ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; LITHOGRAPHY; MICROMACHINING; MICROSTRUCTURE; POLYMERS; THIN FILM TRANSISTORS;

MICRO STEREO LITHOGRAPHY (MSL); SACRIFICIAL POLYMERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035770635     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.448953     Document Type: Conference Paper

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