Ceramic tape-based meso systems technology

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 66, Issue , 1998, Pages 491-498

  Bau, Haim H ^a   Ananthasuresh, Suresh G K ^a   Santiago Aviles, Jorge J ^a   Zhong, Jihua ^a   Kim, Moon ^a   Yi, Mingqiang ^a   Espinoza Vallejos, Patricio ^a   Sola Laguna, Luis ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; SUBSTRATES;

LOW TEMPERATURE CO-FIRED CERAMIC TAPES (LTCC);

TAPES;

EID: 0032304196     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)