Growth and characterisation of shape memory alloy thin films for micropositioning and microactuation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3511, Issue , 1998, Pages 174-182

  Davies, S T ^a   Tsuchiya, K ^a  

^a UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

Ion beam sputter deposition; Microactuator; Micropositioning; Shape memory alloy; TiNi thin film

Indexed keywords

CHARACTERIZATION; FILM GROWTH; LOW TEMPERATURE OPERATIONS; METALLOGRAPHIC MICROSTRUCTURE; MICROACTUATORS; MICROELECTRONIC PROCESSING; SPUTTER DEPOSITION; TEMPERATURE MEASUREMENT; THIN FILMS; TITANIUM NITRIDE;

ION BEAM SPUTTER DEPOSITION; MICROPOSITIONING; SHAPE MEMORY ALLOY THIN FILMS;

SHAPE MEMORY EFFECT;

EID: 0000005655     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.324296     Document Type: Conference Paper

References (7)

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