-
1
-
-
0035248197
-
Multilayer planarization of polymer dielectrics
-
P. Chiniwalla et al., Multilayer planarization of polymer dielectrics, IEEE Transaction on Advanced Packaging, 24 (1), p.41-53, 2001.
-
(2001)
IEEE Transaction on Advanced Packaging
, vol.24
, Issue.1
, pp. 41-53
-
-
Chiniwalla, P.1
-
2
-
-
0035023799
-
New thin film epitaxial polysilicon encapsulation for piezoresistive accelerometers
-
Interlaken, Switzerland
-
A. Partridge et al., New Thin Film Epitaxial Polysilicon Encapsulation for Piezoresistive Accelerometers, Proc. MEMS '01, Interlaken, Switzerland, p.54-59, 2001.
-
(2001)
Proc. MEMS '01
, pp. 54-59
-
-
Partridge, A.1
-
3
-
-
0001034527
-
New designs of micromachined vibrating rate gyroscopes with decoupled oscillation modes
-
Chicago, USA
-
W. Geiger et al., New designs of micromachined vibrating rate gyroscopes with decoupled oscillation modes, Proc. Transducers '97, Chicago, USA, p.1129, 1997.
-
(1997)
Proc. Transducers '97
, pp. 1129
-
-
Geiger, W.1
-
4
-
-
0033149765
-
Sealing of micromachined cavities using chemical vapour deposition methods: Characterisation and optimisation
-
C. Liu, Y.-C. Tai, Sealing of micromachined cavities using chemical vapour deposition methods: Characterisation and optimisation, JMEMS 8 (2), p.135-145, 1999.
-
(1999)
JMEMS
, vol.8
, Issue.2
, pp. 135-145
-
-
Liu, C.1
Tai, Y.-C.2
-
5
-
-
0033353335
-
Planarization processes and applications I. Undoped GeO2-SiO2 glasses
-
D.L. Simpson et al., Planarization Processes and Applications I. Undoped GeO2-SiO2 Glasses, J. Electrochem. Soc. 146(10) p.3860-3871, 1999.
-
(1999)
J. Electrochem. Soc.
, vol.146
, Issue.10
, pp. 3860-3871
-
-
Simpson, D.L.1
-
6
-
-
0010942347
-
Micromachined devices for space telecom applications
-
15-17 May; Noordwijk, The Netherlands
-
H. Jansen at al., Micromachined devices for space telecom applications, Proc. 3rd Round Table on Micro/Nano-Technologies for Space. ESA, p. 135-140, 15-17 May 2000; Noordwijk, The Netherlands.
-
(2000)
Proc. 3rd Round Table on Micro/Nano-Technologies for Space. ESA
, pp. 135-140
-
-
Jansen, H.1
-
7
-
-
0032635182
-
Post-CMOS integration of germanium microstructures
-
Orlando, Florida, USA
-
A.E. Franke et al., Post-CMOS Integration of Germanium Microstructures, Proc. MEMS '99, Orlando, Florida, USA, p.630-637, 1999.
-
(1999)
Proc. MEMS '99
, pp. 630-637
-
-
Franke, A.E.1
-
9
-
-
84929799503
-
HF etching of Si-oxides and Si-nitrides for surface micromachining
-
Enschede, the Netherlands, May
-
B. Du Bois et al., HF etching of Si-oxides and Si-nitrides for surface micromachining, Proc. Dutch National Sensor Conference, Enschede, the Netherlands, May 2001.
-
(2001)
Proc. Dutch National Sensor Conference
-
-
Du Bois, B.1
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