Geometry versus optical performance of micromirrors and arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3440, Issue , 1998, Pages 140-147

  Michalicek, M Adrian ^a   Comtois, John H ^a   Schriner, Heather K ^b  

^a AIR FORCE RESEARCH LABORATORY   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Aberrations; Adaptive Optics; Arrays; FBMD; Micromirrors; MOEMS; Optical MEMS; Strehl Ratio; SUMMiT

Indexed keywords

ADAPTIVE OPTICS; ARRAYS; COMPUTER SIMULATION; MICROELECTROMECHANICAL DEVICES; POLYSILICON; SURFACES;

MICROMIRRORS;

MIRRORS;

EID: 0010824467     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.326690     Document Type: Conference Paper

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