Avoidance and elimination of errors in optical scanning

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3823, Issue , 1999, Pages 133-141

  Schulz, Michael ^a   Weingaertner, Ingolf ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Active stabilization; Form measurement; Optical surfaces; Scanning; Topography; Ultraprecision

Indexed keywords

ERRORS; INTERFEROMETRY; PRISMS;

ACTIVE STABILIZATION; ANGULAR POSITIONS; DIFFERENCE MEASUREMENTS; DIFFERENCE METHOD; INTERFEROMETRIC TECHNIQUES; REPRODUCIBILITIES; SCANNING TECHNIQUES; UNDERLYING PRINCIPLES;

SCANNING;

EID: 85088271087     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.360981     Document Type: Conference Paper

References (6)

1. E. Debler, K. Zander,, Entwicklung eines beruhrungslosen, automatisch arbeitenden Verfahrens zur Messung der Ebenheit optischer Planflächen", PTB-Bericht, Physikalisch-Technische Bundesanstalt, Braunschweig, Germany, 1983.
2. K. Zander, A. Emmerich,, Polarimetry and the International Sugar Scale", Sugar Techn. Rev. 14, pp. 275-330, 1988.
3. H. Melle,, Influence of a Faraday rotator upon the polarization of coherent light", Optik 78, pp. 35-38, 1987.
4. C. Elster, I. Weingartner,, A new method for exact wavefront reconstruction from two lateral shearing interferograms", J. Opt. Soc. Am., accepted for publication.
5. Patent, Germany (1998) :198 29 382.8.
6. C. J. Evans, R. J. Hocken, W. T. Estler,, Self-calibration: Reversal, redundancy, error separation, and, absolute testing", CIRP Annals, 45/2, pp. 567-584, 1996.