Generation of large-diameter diffractive elements with laser pattern generation

Applied Optics

Volumn 36, Issue 34, 1997, Pages 8970-8975

  Bowen, John P ^a,b   Michaels, Robert L ^a,c   Blough, C Gary ^a,d  

^a Rochester NY USA   (United States)

^b EASTMAN KODAK COMPANY   (United States)

^c Tropel Corporation ^*  (United States)

^d Melles Griot   (United States)

Author keywords

Binary optics; Diffractive optics; Laser pattern generation; Null optics; Rotational pattern generator

Indexed keywords

ABERRATIONS; COMPUTER CONTROL; INTERFEROMETERS; LASER BEAMS; LENSES; LIGHT MODULATORS; MACHINE DESIGN; NUMERICAL METHODS; PHOTORESISTS; SUBSTRATES; USER INTERFACES;

BINARY OPTICS; DIFFRACTIVE OPTICS; HIGH PRECISION LASER WRITING MACHINE; LASER PATTERN GENERATION; LASER WRITER SYSTEM; NULL OPTICS; ROTATIONAL PATTERN GENERATOR;

LASER OPTICS;

EID: 0031380561     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.008970     Document Type: Article

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