Metrological characterization of an ARS sensor based on an elliptical mirror system and a calibrated CMOS photo detector array

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4447, Issue , 2001, Pages 53-64

  Rinder, Thomas ^a   Rothe, Hendrik ^a  

^a HELMUT SCHMIDT UNIVERSITY   (Germany)

Author keywords

Calibrated CMOS photo detector array; Elliptical mirror system; Particle detection; Roughness measurement

Indexed keywords

CMOS INTEGRATED CIRCUITS; LIGHT SCATTERING; MIRRORS; PHOTODETECTORS; SURFACE PROPERTIES; SURFACE ROUGHNESS;

ANGLE-RESOLVED LIGHT SCATTER (ARS) SENSORS; ELLIPTICAL MIRROR SYSTEMS (EMS);

OPTICAL SENSORS;

EID: 0035759537     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.446736     Document Type: Conference Paper

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