Evaluation of in-situ ARS sensors for characterizing smooth and rough surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3426, Issue , 1998, Pages 252-261

  Kasper, André ^a   Rothe, Hendrik ^a  

^a HELMUT SCHMIDT UNIVERSITY   (Germany)

Author keywords

Bidirectional reflectance distribution function(BRDF); Scatter instrumentation; Scatter sensors; Surface roughness

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; FIBER OPTIC SENSORS; SURFACE ROUGHNESS; WAVEGUIDES;

SCATTER INSTRUMENTATION;

LIGHT SCATTERING;

EID: 0032224674     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.328462     Document Type: Conference Paper

References (11)

1. Geometric considerations and nomenclature for reflectance
2. Discrimination of surface properties using BRDF-variance estimators as feature variables
3. Status of bidirectional reflectance distribution function (BRDF) calibration standards development
4. Comparison of PSD measurements using stray light sensors with PSD curves evaluated from topography of large AFM scans
5. Fast and accurate roughness characterization techniques for wafers and hard disks
6. Application of circular and spherical statistics for the interpretation of BRDF-measurements
7. Statistical estimators of spatial vector fields in defect classification and texture modeling of high tech surfaces
8. Practical application of pattern recognition techniques