Fabrication of GaAs microtips for scanning tunneling microscopy by wet etching

Journal of the Electrochemical Society

Volumn 143, Issue 8, 1996, Pages 2616-2619

  Yamaguchi, Koichi ^a   Tada, Satoshi ^a  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMS; ELECTRIC CURRENTS; ELECTRON TUNNELING; ETCHING; SCANNING TUNNELING MICROSCOPY; SOLUTIONS; SULFUR; SULFURIC ACID; SURFACE TREATMENT; SURFACES; THERMAL EFFECTS;

GALLIUM ARSENIDE MICROTIPS; GRAPHITE SURFACE; SULFUR ATOMS; SURFACE PASSIVATION; WET ETCHING METHOD;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0030212032     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837057     Document Type: Article

References (15)

1. G. Binnig, H. Rohrer, Ch. Gerber, and E. Weibel, Phys. Rev. Lett., 49, 57 (1982).
2. G. Nunes, Jr., and N. M. Amer, Appl. Phys. Lett., 63, 1851 (1993).
3. M. J. Vasile, C. Biddick, and H. Huggins, ibid., 64, 575 (1994).
4. M. W. J. Prins, M. C. M. M. van der Wielen, R. Jansen, D. L. Abraham, and H. van Kempen, ibid., 64, 1207 (1994).
5. K. Yamaguchi, K. Okamoto, and S. Yugo, J. Appl. Phys., 77, 6061 (1995).
6. D. T. Pierce, Phys. Scripta. 38, 291 (1988).
7. S. F. Alvarado and P. Renaud, Phys. Rev. Lett., 68, 1387 (1992).
8. K. Sueoka, K. Mukasa, and K. Hayakawa, Jpn. J. Appl. Phys., 32, 2989 (1993).
9. R. Laiho and H. J. Reittu, Surf. Sci., 289, 363 (1993).
10. R. Wiesendanger and H. J. Guntherodt, Phys. Rev. Lett., 65, 247 (1990).
11. I. V. Shvets, R. Wiesendanger, D. Burgler, G. Tarrach, H. J. Guntherodt, and J. M. D. Coey, J. Appl. Phys., 71, 5489 (1992).
12. Y. Nannichi, J. F. Fan, H. Oigawa, and A. Koma, Jpn. J. Appl. Phys., 27, L2367 (1988).
13. M. Tanimoto, H. Yokoyama, M. Shinohara, and N. Inoue, ibid., 33, L279 (1994).
14. S.-L. Park and C. F. Quate, Appl. Phys. Lett., 48, 112 (1986).
15. H. Band, N. Morita, H. Tokumoto, W. Mizutani, K. Watanabe, A. Homma, S. Wakiyama, M. Shigeno, K. Endo, and K. Kajimura, J. Vac. Sci. Technol, A6, 344 (1988).