Impact of scattering bar in the presence of lens aberrations

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4346, Issue 2, 2001, Pages 1554-1566

  Khoh, Andrew ^a,b   Minghetti, Blandine ^a   Choi, Byoung Il ^a   Wu, Yihong ^b   Samudra, Ganesh S ^b  

^a CSMTD   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Astigmatism; Coma; Lens aberrations; Opc; Scattering bars; Simulations; Solid c

Indexed keywords

ABERRATIONS; COMPUTER SIMULATION; MASKS; MONTE CARLO METHODS; OPTICAL INSTRUMENT LENSES; ULTRAVIOLET RADIATION;

ASTIGMATISM; SCATTERING BARS;

LITHOGRAPHY;

EID: 0035758508     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.435698     Document Type: Article

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