Impact of lens aberration on pattern symmetry of DRAM cells

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4000, Issue , 2000, Pages

  Kobayashi, Katsuyoshi ^a   Yao, Teruyoshi ^a   Yanagishita, Yuichirou ^a   Hanyu, Isamu ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; COMPUTER SIMULATION; DYNAMIC RANDOM ACCESS STORAGE; IMAGE ANALYSIS; MONTE CARLO METHODS; POLYNOMIALS;

PATTERN SYMMETRY; ZERNIKE COEFFICIENT; ZERNIKE POLYNOMIALS;

OPTICAL INSTRUMENT LENSES;

EID: 0033684958     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)