Direct shape measurement by digital wavefront reconstruction and multiwavelength contouring

Optical Engineering

Volumn 39, Issue 1, 2000, Pages 79-85

  Wagner, Christophe ^a   Osten, Wolfgang ^a   Seebacher, Soenke ^a  

^a BIAS BREMER INSTITUT FÜR ANGEWANDTE STRAHLTECHNIK GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CHARGE COUPLED DEVICES; COMPUTATIONAL GEOMETRY; IMAGE RECONSTRUCTION; OPTICAL RECORDING; OPTICAL SENSORS; WAVEFRONTS;

DIGITAL WAVEFRONT RECONSTRUCTION; DIRECT HOLOGRAPHIC MULTIWAVELENGTH CONTOURING TECHNIQUES; DIRECT SHAPE MEASUREMENT;

HOLOGRAPHIC INTERFEROMETRY;

EID: 0033888658     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.602338     Document Type: Article

References (14)

1. R. J. Pryputniewicz, "Heterodyne holography applications in studies of small components," Opt. Eng. 24, 849-854 (1985).
2. M. Kujawinska and R. J. Pryputniewicz, "Micromeasurements: a challenge for photomechanics," Proc. SPIE 2782, 15-24 (1996).
3. S. Seebacher, W. Osten, and W. Jüptner, "3-D deformation analysis of microcomponents using digital holography," Proc. SPIE 3098, 382-391 (1997).
4. W. Jüptner, M. Kujawinska, W. Osten, L. Salbut, and S. Seebacher, "Combined measurement of silicon microbeams by grating interferometry and digital holography," Proc. SPIE 3407, 348-357 (1998).
5. S. Seebacher, W. Osten, and W. Jüptner, "Measuring shape and deformation of small objects using digital holography," Proc. SPIE 3479, 104-115 (1998).
6. U. Schnars, "Direct phase determination in hologram interferometry with use of digitally recorded holograms," J. Opt. Soc. Am. A 11, 2011-2015 (1994).
7. T. Demetrakopoulos and R. Mittra, "Digital and optical reconstruction of images from suboptical diffraction patterns," Appl. Opt. 13(3), 665-670 (1974).
8. M. Takeda, K. Taniguchi, T. Hirayama, and H. Kohgo, "Single-transform Fourier/Hartley fringe analysis for holographic interferometry," in Simulation and Experiment in Laser Metrology, pp. 67-73, Akademie Verlag, Berlin (1996).
9. M. Takeda and H. Yamamoto, "Fourier transform speckle profilometry: three-dimensional shape measurements of diffuse objects with large height steps and/or spatially isolated surfaces," Appl. Opt. 33, 7829-7837 (1994).
10. W. Osten, W. Nadeborn, and P. Andrä, "General hierarchical approach in absolute phase measurement," in Laser Interferometry VIII: Techniques and Analysis, M. Kujawinska, G. Brown, and M. Takeda, Eds., Proc. SPIE 2860, 2-13 (1996).
11. T. Pfeifer, H. Mischo, S. Koch, and J. Evertz, "Coded speckle-interferometrical formtesting," in Proc. Fringe '97 Automatic Processing of Fringe Patterns, pp. 171-178, Akademie Verlag, Berlin (1997).
12. I. Yamaguchi, A. Yamamoto, and S. Kuwamura, "Shape measurement of diffuse surfaces by wavelength scanning," in Proc. Fringe '97 Automatic Processing of Fringe Patterns, pp. 190-197, Akademie Verlag, Berlin (1997).
13. C. Wagner, S. Seebacher, W. Osten, and W. Jüptner, "Digital recording and numerical reconstruction of lensless Fourier holograms in optical metrology," Appl. Opt. 38(22), 4812-4820 (1999).
14. W. Nadeborn, P. Andrä, and W. Osten, "A robust procedure for absolute phase measurement," Opt. Lasers Eng. 24, 245-260 (1996).