Absolute shape control of microcomponents using digital holography and multi-wavelength-contouring

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4275, Issue , 2001, Pages 71-84

  Osten, W ^a   Seebacher, S ^a   Baumbach, T ^a   Juptner W ^a  

^a BIAS BREMER INSTITUT FÜR ANGEWANDTE STRAHLTECHNIK GMBH   (Germany)

Author keywords

Absolute phase measurement; Digital holography; Direct phase measurement; Material parameters; Microcomponent testing; Multi wavelengths contouring; Optical shape measurement

Indexed keywords

APPROXIMATION THEORY; BOUNDARY VALUE PROBLEMS; CHARGE COUPLED DEVICES; COMPUTER SIMULATION; ELASTIC MODULI; FOURIER TRANSFORMS; MICROELECTROMECHANICAL DEVICES; OPTICAL TESTING; PHASE MEASUREMENT; POISSON RATIO; THERMAL EXPANSION;

ABSOLUTE PHASE MEASUREMENT; ABSOLUTE SHAPE CONTROL; DIGITAL HOLOGRAPHY; DIRECT PHASE MEASUREMENT; MICROCOMPONENTS; PHASE DISTRIBUTION; SPATIAL UNWRAPPING PROCEDURE;

HOLOGRAPHIC INTERFEROMETRY;

EID: 0034872442     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.429350     Document Type: Conference Paper

References (14)

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