Control of second order temperature coefficient of SAW propagating in two thin film layers

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1993, Pages 287-290

  Nakagawa, Y ^a  

^a UNIVERSITY OF YAMANASHI   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE TRANSMISSION; QUARTZ; SUBSTRATES; TANTALUM COMPOUNDS; TEMPERATURE CONTROL; THIN FILMS; ZINC OXIDE;

FUSED QUARTZ; SECOND ORDER TEMPERATURE COEFFICIENT; TWO LAYER SUBSTRATES;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0027758442     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ultsym.1993.339570     Document Type: Conference Paper

References (3)