On the Integration of Design and Test for Chips Embedding MEMS

IEEE Design and Test of Computers

Volumn 16, Issue 4, 1999, Pages 28-38

  Mir, Salvador ^a   Charlot, Benoit ^b  

^a TIMA LABORATORY   (France)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003248102     PISSN: 07407475     EISSN: None     Source Type: Journal    
DOI: 10.1109/54.808204     Document Type: Article

References (10)

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2. A. Kolpekwar and R.D. (Shawn) Blanton, "Development of a MEMS Testing Methodology," IEEE Int'l Test Conf., Washington, D.C., pp. 923-931, Nov. 1997.
3. T. Olbrich, A. Richardson, B. Straube, and W. Vermeiren, "Integrated Test Support for Micro-Electro-Mechanical-Systems (MEMS)," Fifth Int'l Conf. Micro-, Electro-, Opto-, Mechanical Systems and Components, Potsdam, Germany, Sept. 1996, pp. 273-279.
4. E.K. Antonsson, ed., Structured Design Methods for MEMS, National Science Foundation Workshop, Nov. 1995.
5. W. Vermeiren, B. Straube, and A. Holubek, "Defect-Oriented Experiments in Fault Modeling and Fault Simulation of Microsystem Components," IEEE European Design and Test Conf., Paris, Mar. 1996, pp. 522-527.
6. Multi-Project Circuits (CMP) Service, Reference Manual for ICs, MEMS and MCMs Manufacturing, http://tima-cmp.imag.fr/-CMP/CMPMan.html.
7. T. Mukherjee and G.K. Fedder, "Structured Design of Microelectromechanical Systems," 34th Design Automation Conf., Anaheim, Calif., June 1997, pp. 680-685.
8. D.A. Koester, R. Mahadevan, A. Shishkoff, and K.W. Markus, SmartMUMPS Design Handbook. MEMS Technology Applications Center MCNC, Mar. 1996. Revision 4.0. http://mems.mcnc.org.
9. W.C. Tang, T.-C.H. Nguyen, and R.T. Howe, "Laterally Driven Polysilicon Resonant Microstructures," Sensors and Actuators, vol. 20, pp. 25-32, 1989.
10. M. Lubaszewski, E.F. Cota, and B. Courtois, "Microsystems Testing: An Approach and Open Problems," IEEE Design, Automation and Test in Europe Conf., Paris, Feb. 1998, pp. 23-26.