Broad sweep of integrated microsystems

IEEE Spectrum

Volumn 35, Issue 12, 1998, Pages 24-33

  Picraux, Tom S ^a   McWhorter, Paul J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANALOG TO DIGITAL CONVERSION; CHEMICAL SENSORS; COSTS; ELECTRONICS INDUSTRY; ELECTRONICS PACKAGING; INTEGRATED OPTOELECTRONICS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PROCESS CONTROL; SILICON WAFERS;

ANALOG CONTROL ELECTRONICS; HYDROGEN SENSORS; INTEGRATED MICROSYSTEMS;

MICROELECTRONICS;

EID: 0032291318     PISSN: 00189235     EISSN: None     Source Type: Journal    
DOI: 10.1109/6.736447     Document Type: Article

References (0)