|
Volumn 308-310, Issue , 2001, Pages 396-399
|
Nitrogen effect on gold diffusion in Cz Si
|
Author keywords
Gold diffusion; Nitrogen; Self interstitials; Silicon
|
Indexed keywords
CRYSTAL GROWTH FROM MELT;
DIFFUSION IN SOLIDS;
GOLD;
NITROGEN;
PRECIPITATION (CHEMICAL);
SEMICONDUCTOR DOPING;
SUBSTITUTION REACTIONS;
SELF-INTERSTITIALS;
SEMICONDUCTING SILICON;
|
EID: 0035677945
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-4526(01)00758-X Document Type: Article |
Times cited : (5)
|
References (21)
|