NbN/Nb/AlOx/Nb/NbN junctions fabricated using an ultra-high vacuum dc-magnetron sputtering system

Superconductor Science and Technology

Volumn 14, Issue 12, 2001, Pages 1144-1147

  Nakamura, K ^a   Akaike, H ^a   Ninomiya, Y ^a   Tate, Y ^a   Fujimaki, A ^a   Hayakawa, H ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL CURRENT DENSITY (SUPERCONDUCTIVITY); MAGNETIC HYSTERESIS; MAGNETRON SPUTTERING; NIOBIUM COMPOUNDS; OXIDATION; SUPERCONDUCTING FILMS; THIN FILMS; ULTRAHIGH VACUUM;

SINGLE FLUX QUANTUM (SFQ) CIRCUITS;

JOSEPHSON JUNCTION DEVICES;

EID: 0035665013     PISSN: 09532048     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-2048/14/12/335     Document Type: Article

References (8)

1. RSFQ logic/memory family; A new Josephson-junction technology for sub-terahertz-clock-frequency digital systems
2. Extraction of material parameters in NbN multiplayer technology for RSFQ circuits
3. All-NbN single flux quantum circuits based on NbN/AlN/NbN tunnel junctions
4. An improved NbN integrated circuit process featuring thick NbN ground plane and lower parasitic circuit inductances
5. Characterization of NbN/AlN/NbN tunnel junctions
6. x/Nb trilayer technology
7. x/Nb multilayered barriers
8. x/Nb trilayers