Metal film protection of CMOS wafers against KOH

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 608-613

  Munch, U ^a   Brand, O ^a   Paul, O ^a   Baltes, H ^a   Bossel, M ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ETCHING; METALLIC FILMS; POTASSIUM COMPOUNDS; PROTECTIVE COATINGS; SILICON WAFERS; SOLUTIONS; TITANIUM COMPOUNDS;

METAL FILM PROTECTION;

CMOS INTEGRATED CIRCUITS;

EID: 0033720477     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)