Spectral infrared absorption of CMOS thin film stacks

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 106-111

  Schneeberger, Niklaus ^a   Paul, Oliver ^a   Baltes, Henry ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; INFRARED RADIATION; LIGHT ABSORPTION; MICROMACHINING; SPECTRUM ANALYSIS; THIN FILMS;

MICROMACHINED THERMAL INFRARED SENSORS;

MICROSENSORS;

EID: 0032636882     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746780     Document Type: Conference Paper

References (7)