Application of dual-doped TMAH silicon etchant in the fabrication of a micromachined aluminum flexing beam actuator

Sensors and Materials

Volumn 13, Issue 6, 2001, Pages 351-358

  Garra, John ^a   Brida, Sebastiano ^b   Ferrario, Lorenza ^b   Paranjape, Makarand ^a  

^a GEORGETOWN UNIVERSITY   (United States)

^b ITC IRST   (Italy)

Author keywords

Aluminum actuator; CMOS compatible; Magnetometer; TMAH with additives

Indexed keywords

EID: 0035649169     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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