Diamond synthesis via C-H metal precursors processed in hot filament chemical vapor deposition and microwave plasma chemical vapor deposition

Thin Solid Films

Volumn 377-378, Issue , 2000, Pages 274-279

  Wong, Ming Show ^a   Lu, Chung An ^a   Chang, Hsiao Kho ^a   Yang, Tien Syh ^a   Wu, Jane How ^a   Liou, Yung ^b  

^a NATIONAL DONG HWA UNIVERSITY   (Taiwan)

^b ACADEMIA SINICA   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FILM GROWTH; PARTICLE SIZE ANALYSIS; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION ANALYSIS;

HOT FILAMENT CHEMICAL VAPOR DEPOSITIONS; LOW-PRESSURE SOLID STATE SOURCES; MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION (MPCVD);

DIAMOND FILMS;

EID: 16744364064     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01327-4     Document Type: Article

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