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Applied Physics A: Materials Science and Processing

Volumn 73, Issue 6, 2001, Pages 761-763

Ion-beam-assisted MBE growth of semi-spherical SiGe/Si nano-structures

(3) Gaiduk, P I a Lundsgaard Hansen, J a Nylandsted Larsen, A a

a AARHUS UNIVERSITY (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; ION BEAMS; ION IMPLANTATION; MOLECULAR BEAM EPITAXY; MORPHOLOGY; MULTILAYERS; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR QUANTUM DOTS; SURFACES; TRANSMISSION ELECTRON MICROSCOPY;

CROSS-SECTION TRANSMISSION ELECTRON MICROSCOPY; SEMI-SPHERICAL NANOSTRUCTURE; SURFACE PATTERNING;

NANOSTRUCTURED MATERIALS;

EID: 0035575454 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s003390101018 Document Type: Article

Times cited : (4)

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