Optical emission spectroscopy analysis on the chemical reaction in etching of SrBi2Ta2O9 (SBT) thin films using inductively coupled Cl2/Ar plasma

Journal of the Korean Physical Society

Volumn 39, Issue SUPPL. Part 1, 2001, Pages

  Kim, Chang Il ^a   Kim, Dong Pyo ^a   Shin, Sung Uk ^a   Sim, Kwee Bo ^a   Chang, Eui Goo ^a  

^a Chung Ang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035542177     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

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