Effects of BCl3 addition in Cl2/Ar plasma etching of (Ba,Sr)TiO3 thin films

Journal of the Korean Physical Society

Volumn 38, Issue 3, 2001, Pages 264-267

  Kim, Seung Bum ^a   Min, Byung Jun ^a   Kim, Dong Pyo ^a   Kim, Chang Il ^a  

^a Chung Ang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035532407     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

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