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Volumn 52, Issue 13, 1997, Pages 1983-1993
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Atmospheric pressure, radio frequency, parallel plate capacitively coupled plasma - Excitation temperatures and analytical figures of merit
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Author keywords
Capacitively coupled plasma; Excitation temperature; Helium plasma; Rotational temperature
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Indexed keywords
ATMOSPHERIC PRESSURE;
COMPUTATIONAL METHODS;
HELIUM;
IRON;
LEAD;
MOLECULAR SPECTROSCOPY;
SIGNAL TO NOISE RATIO;
SILVER;
TEMPERATURE MEASUREMENT;
BOLTZMANN PLOTS;
CAPACITIVELY COUPLED PLASMAS;
EXCITATION TEMPERATURE;
RADIO FREQUENCY PLASMAS;
ROTATIONAL TEMPERATURE;
PLASMAS;
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EID: 0031268588
PISSN: 05848547
EISSN: None
Source Type: Journal
DOI: 10.1016/S0584-8547(97)00080-3 Document Type: Article |
Times cited : (18)
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References (46)
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