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Volumn 15, Issue 6, 2000, Pages 579-580
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Low-power 2.45 GHz microwave induced helium plasma source at atmospheric pressure based on microstrip technology
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Author keywords
[No Author keywords available]
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Indexed keywords
ATMOSPHERIC PRESSURE;
CHARGE COUPLED DEVICES;
CHLORINE COMPOUNDS;
ELECTRIC FIELD EFFECTS;
HELIUM;
MICROSTRIP LINES;
MICROWAVES;
PERMITTIVITY;
PLASMA SOURCES;
SAPPHIRE;
SUBSTRATES;
ATOMIC EMISSION SPECTROMETRY;
MICROSTRIP PLASMA SOURCE;
MICROWAVE INDUCED PLASMA;
SPECTROMETRY;
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EID: 0033704260
PISSN: 02679477
EISSN: None
Source Type: Journal
DOI: 10.1039/b001647k Document Type: Article |
Times cited : (87)
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References (11)
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