Observation of speckle patterns in extreme ultraviolet imaging

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 6, 2001, Pages 2406-2411

  Solak, H H ^a,b   Yang, Y ^a   Cerrina, F ^a  

^a University of Wisconsin Madison   (United States)

^b PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; IMAGING SYSTEMS; IMAGING TECHNIQUES; LIGHT SCATTERING; MIRRORS; OPTICAL SYSTEMS; SURFACE ROUGHNESS; ULTRAVIOLET RADIATION;

EXTREME ULTRAVIOLET OPTICS; SPECKLE PATTERNS; SPECTRAL DENSITY; SUBNANOMETER ROUGHNESS; ULTRAVIOLET IMAGING;

PHOTOLITHOGRAPHY;

EID: 0035519454     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1421550     Document Type: Article

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