Three-dimensional structures assembled from polysilicon surface micromachined components containing continuous hinges and microrivets

Thin Solid Films

Volumn 398-399, Issue , 2001, Pages 566-571

  Kolesar, E S ^a   Ruff, M D ^a   Odom, W E ^a   Howard, J T ^a   Ko, S Y ^a   Allen, P B ^a   Wilken, J M ^a   Wilks, R J ^a   Bosch, J E ^a   Boydston, N C ^a  

^a TEXAS CHRISTIAN UNIVERSITY   (United States)

Author keywords

Latching arrowheads; Microhinge; Microrivets; Surface micromachining; Three dimensional structures

Indexed keywords

ELECTRIC FUSES; ETCHING; GLASS; HINGES; MICROELECTROMECHANICAL DEVICES; POLYSILICON; RIVETS;

SURFACE MICROMACHINING;

MICROMACHINING;

EID: 0035507756     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01319-0     Document Type: Conference Paper

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