MicroJoinery: Concept, definition, and application to microsystem development

Sensors and Actuators, A: Physical

Volumn 66, Issue 1-3, 1998, Pages 315-332

  Gonzalez C ^a,b   Smith, Rosemary L ^a   Howitt, D G ^a   Collins, Scott D ^a  

^a University of California   (United States)

^b ABBOTT LABORATORIES   (United States)

Author keywords

Anisotropic etching; MEMS; Microfabrication; Optics; Silicon

Indexed keywords

ANISOTROPY; ETCHING; SILICON;

MICROFABRICATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0032046895     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00074-0     Document Type: Article

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