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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 6, 2001, Pages 2910-2919

Real-time/in situ diffraction study of phase and microstructural evolution in sputtered β-Ta/Ta2O5films

(3) Whitacre, J F a Yalisove, S M a Bilello, J C a

a CALIFORNIA INSTITUTE OF TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; TEXTURES; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY; X RAY SCATTERING;

GRAZING INCIDENCE X-RAY SCATTERING (GIXS);

METALLIC FILMS;

EID: 0035507361 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1414119 Document Type: Article

Times cited : (5)

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