Structure and mechanical properties of argon assisted carbon nitride films

Thin Solid Films

Volumn 398, Issue 399, 2001, Pages 124-129

  Valentini, L ^a   Kenny, J M ^a   Gerbig, Y ^b   Savan, A ^b   Haefke, H ^b   Lozzi, L ^c   Santucci, S ^c  

^a UNIVERSITY OF PERUGIA   (Italy)

^b CSEM   (Switzerland)

^c UNIVERSITY OF L'AQUILA   (Italy)

Author keywords

Raman scattering; Tribology; X Ray photoelectron spectroscopy

Indexed keywords

ADHESION; ARGON; CARBON NITRIDE; CHEMICAL BONDS; DEPOSITION; GLOW DISCHARGES; GRAPHITIZATION; SILICON; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

X-RAY REFLECTIVITY (XRR);

AMORPHOUS FILMS;

EID: 0035506122     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01458-4     Document Type: Article

References (26)

1. Handbook of X-ray photoelectron spectroscopy