SCOPUS 정보 검색 플랫폼

Journal of Micromechanics and Microengineering

Volumn 11, Issue 6, 2001, Pages 623-629

A versatile and modularizable micromachining process for the fabrication of thermal microsensors and microactuators

(4) Friedberger, A a Kreisl, P a Muller G a Kassing, R b

a AIRBUS GROUP INNOVATIONS (Germany)

b UNIVERSITY OF KASSEL (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; CRYSTAL MICROSTRUCTURE; FOUNDRIES; LAYERED MANUFACTURING; MICROACTUATORS; MICROMACHINING; POROUS SILICON; STRENGTH OF MATERIALS; THERMAL INSULATION;

SILICON FOUNDRIES;

MICROSENSORS;

EID: 0035505196 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/11/6/302 Document Type: Article

Times cited : (13)

References (23)

1
- 0004171924
- New York: Wiley
- (1994) Semiconductor Sensors , pp. 331-382
- Sze, S.M.¹

2
- 0000513950
- Semiconductor bridge: A plasma generator for the ignition of explosives
- (1987) J. Appl. Phys. , vol.62 , pp. 1622-1632
- Benson, D.A.¹ Larsen, M.E.² Renlund, A.M.³ Trott, W.M.⁴ Bickes R.W., Jr.⁵

3
- 5544256931
- Smart semiconductor bridge (SCB) igniter for explosives
- (1988) 3rd Canadian Symposium on Mining Automation (Montreal)
- Bickes R.W., Jr.¹

4
- 0000077361
- Silicon hotplates for metal oxide gas sensor elements
- (1997) Microsyst. Technol. , vol.3 , pp. 183-190
- Sberveglieri, G.¹ Hellmich, W.² Müller, G.³

5
- 0006747825
- 2 gas sensors in temperature pulsed operation mode
- Bristol: Institute of Physics Publishing
- (1998) Proc. Eurosensors XII , pp. 225-228
- Jägle, M.¹ Wöllenstein, J.² Meisinger, T.³ Böttner, H.⁴ Müller, G.⁵ Becker, T.⁶ Bosch von Braunmühl, C.⁷

6
- 0038744681
- 2 films deposited onto Si micromachined substrates
- (1995) Proc. East Asia Conf. on Chemical Sensors (Xi'an, China)
- Hellmich, W.¹ Krenkow, A.² Bosch von Braunmühl, C.³ Müller, G.⁴ Perego, C.⁵ Faglia, G.⁶ Sberveglieri, G.⁷

7
- 0028259815
- Photoassisted electrochemical micromachining of silicon in HF electrolytes
- (1994) Sensors Actuators A , vol.40 , pp. 49-55
- Mlcak, R.¹ Tuller, H.L.² Greiff, P.³ Sohn, J.⁴ Niles, L.⁵

8
- 0028385324
- Porous polycrystalline silicon: A new material for MEMS
- (1994) J. Microelectromech. Syst. , vol.3 , pp. 10-18
- Anderson, R.C.¹ Muller, R.S.² Tobias, C.W.³

9
- 1542441560
- Porous silicon sacrificial layer technique for the fabrication of free standing membrane resonators and cantilever arrays
- (1997) Proc. 11th European Conf. on Solid-State Transducers, Eurosensors XI (Warsaw, Poland) , vol.1 , pp. 285-288
- Racine, G.-A.¹ Genolet, G.² Clerc, P.A.³ Despont, M.⁴ Vettiger, P.⁵ De Rooij, N.F.⁶

10
- 0031222637
- Fabrication of high aspect ratio silicon microstructures by anodic etching
- (1997) J. Micromech. Microeng. , vol.7 , pp. 155-158
- Charlton, M.D.B.¹ Parker, G.J.²

11
- 0029228175
- Micromachining applications of porous silicon
- (1995) Thin Solid Films , vol.255 , pp. 52-58
- Steiner, P.¹ Lang, W.²

12
- 0000472193
- Porous silicon bulk micromachining for thermally isolated membrane formation
- P1.1-82
- (1996) Proc. Eurosensors X (Leuven, Belgium) , pp. 227-230
- Dücsó, C.¹ Vázsonyi, É.² Ádám, M.³ Szabó, I.⁴ Bársony, I.⁵ Gardeniers, J.G.E.⁶ Van den Berg, A.⁷

13
- 0032520377
- Front-side bulk silicon micromachining using porous-silicon technology
- (1998) Sensors Actuators A , vol.65 , pp. 175-179
- Kaltsas, G.¹ Nassiopoulou, A.G.²

14
- 0030391901
- Fabrication of single-crystal Si microstructures by anodization
- (1996) Japan. J. Appl. Phys. , vol.35 , pp. 6648-6651
- Higa, K.¹ Asano, T.²

15
- 0032677310
- Porous silicon technique for realization of surface micromachined silicon structures with large gaps
- (1999) Sensors Actuators A , vol.74 , pp. 104-108
- Artmann, H.¹ Frey, W.²

16
- 0033721844
- 3D flip-up structure of porous silicon with actuator and optical filter for microspectrometer applications
- (2000) Proc. MEMS 2000 (Miyazaki, Japan) , pp. 132
- Lammel, G.¹ Renaud, P.²

17
- 0029221050
- Realization of porous silicon membranes for gas sensor applications
- (1995) Thin Solid Films , vol.255 , pp. 310-312
- Taliercio, T.¹ Dilhan, M.² Massone, E.³ Gué, A.M.⁴ Fraisse, B.⁵ Foucaran, A.⁶

18
- 0029387321
- Porous silicon: A novel material for microsystems
- (1995) Sensors Actuators A , vol.51 , pp. 31-36
- Lang, W.¹ Steiner, P.² Sandmaier, H.³

19
- 0026439564
- 2 thin-film gas sensors
- (1992) Sensors Actuators B , vol.6 , pp. 239-247
- Sberveglieri, G.¹

20
- 0029233371
- Capillary and van der Waals forces and mechanical stability of porous silicon
- (1995) Thin Solid Films , vol.255 , pp. 135-138
- Grüning, U.¹ Yelon, A.²

21
- 0006680933
- Strain in porous silicon
- ed. L. Canham (INSPEC)
- (1997) Properties of Porous Silicon , pp. 118-123
- Dolino, G.¹ Bellet, D.²

22
- 0006641877
- Dissertation École Polytechnique Palaiseau, France
- (1997) Porous amorphous silicon - Pore formation and photoluminescence properties
- Wehrspohn, R.B.¹

23
- 36849120852
- Stability of a planar interface during solidification of a dilute binary alloy
- (1964) J. Appl. Phys. , vol.35 , pp. 444-451
- Mullins, W.W.¹ Sekerka, R.F.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.