Fabrication of single-crystal Si microstructures by anodization

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers

Volumn 35, Issue 12 B, 1996, Pages 6347-6695

  Higa, Katsuya ^a   Asano, Tanemasa ^a  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; FABRICATION; HYDROGEN; ION IMPLANTATION; IONS; MICROSTRUCTURE; PHOSPHORUS; PRESSURE; SCANNING ELECTRON MICROSCOPY; SENSORS; SINGLE CRYSTALS;

ANODIZATION; MICROCANTILEVER; PIEZORESISTIVE GAUGE; PRESSURE SENSORS; SILICON MICROSTRUCTURES;

POROUS SILICON;

EID: 0030391901     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Review

References (4)