Dependence of energy distributions of interface states on stress conditions

Microelectronic Engineering

Volumn 59, Issue 1-4, 2001, Pages 95-99

  Zhang, W D ^a   Zhang, J F ^a   Uren, M J ^b   Groeseneken, G ^c   Degraeve, R ^c   Lalor, M ^a   Burton, D ^a  

^a LIVERPOOL JOHN MOORES UNIVERSITY   (United Kingdom)

^b QINETIQ   (United Kingdom)

^c IMEC   (Belgium)

Author keywords

CMOS; Defect generation; Energy distribution; Interface states; Reliability

Indexed keywords

CMOS INTEGRATED CIRCUITS; DEFECTS; ENERGY GAP; HYDROGEN; STRESSES;

INTERFACE STATES;

INTERFACES (MATERIALS);

EID: 0035498581     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00678-5     Document Type: Conference Paper

References (13)