Effect of surface morphology of NiCr-bottom electrode on preparation of ferroelectric PZT thin film capacitor

Materials Research Society Symposium - Proceedings

Volumn 433, Issue , 1996, Pages 181-186

  Lee, K B ^a   Rhee, B R ^a   Cho, S K ^a  

^a Sangji University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CAPACITORS; ELECTRODES; LEAD COMPOUNDS; MAGNETRON SPUTTERING; MORPHOLOGY; NICKEL COMPOUNDS; SURFACES; THERMAL EFFECTS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

BOTTOM ELECTRODES;

FERROELECTRIC MATERIALS;

EID: 0030394940     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-433-181     Document Type: Conference Paper

References (10)