Effects of bottom electrodes (Pt and IrO2) on physical and electrical properties of Bi4-xLaxTi3O12 thin film

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 10, 2001, Pages 6008-6011

  Yang, W S ^a   Kim, N K ^a   Yeom, S J ^a   Kweon, S Y ^a   Choi, E S ^a   Roh, J S ^a  

^a Hynix Semiconductor Inc   (South Korea)

Author keywords

Bi4 xLaxTi3O12 (BLT); Bottom electrodes; Crystalline orientation; Ferroelectric film; IrO2; Metalorganic decomposition (MOD); Pt; Stress; Switching polarization

Indexed keywords

BISMUTH COMPOUNDS; CRYSTAL ORIENTATION; CRYSTALLIZATION; DECOMPOSITION; ELECTRIC LOSSES; ELECTRIC PROPERTIES; ELECTRODES; IRIDIUM COMPOUNDS; PLATINUM; POLARIZATION; RAPID THERMAL ANNEALING; STRESSES;

BISMUTH LANTHANUM TITANATE; BOTTOM ELECTRODES; IRIDIUM OXIDE; METALORGANIC DECOMPOSITION; SWITCHING POLARIZATION;

FERROELECTRIC THIN FILMS;

EID: 0035484770     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.6008     Document Type: Article

References (12)