The atomic limit of finite element modeling in MEMS: Coupling of length scales

Analog Integrated Circuits and Signal Processing

Volumn 29, Issue 1-2, 2001, Pages 17-26

  Rudd, Robert E ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

Coupling of length scales; Finite elements; MEMS; Molecular dynamics; Silicon resonator

Indexed keywords

COMPUTER SIMULATION; ELASTICITY; ELECTRON ENERGY LEVELS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; NATURAL FREQUENCIES; RESONATORS;

ATOMIC LIMIT; CONTINUUM ELASTIC THEORY; COUPLING OF LENGTH SCALES METHODOLOGY; MICRORESONATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035477968     PISSN: 09251030     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1011217927309     Document Type: Article

References (19)

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