The atomic limit of finite elements in the simulation of micro-Resonators

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 465-468

  Rudd, Robert E ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

Coupling of length scales; Finite elements; MEMS; Molecular dynamics; Silicon resonators

Indexed keywords

CRYSTAL RESONATORS; ETCHING; FINITE ELEMENT METHOD; MOLECULAR DYNAMICS; MOLECULAR VIBRATIONS; PARALLEL PROCESSING SYSTEMS; SUPERCOMPUTERS;

ATOMIC SCALE; COUPLING OF LENGTH SCALES; MULTISCALE METHODOLOGY; SILICON RESONATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 6344223454     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

1. R.E. Rudd and J.Q. Broughton, Physica Stat. Solidi 217, 2000, in press.
2. R.E. Rudd and J.Q. Broughton, J. Modeling and Sim. Microsys. 1, 29, 1999.
3. A.N. Cleland and M.L. Roukes, Appl. Phys. Lett. 69 2653 1996
4. C.T.-C. Nguyen, et al, Proc. IEEE 86, 1756, 1998.
5. M.P. Blencowe, Physica B 263, 459, 1999.
6. R.E. Rudd and J.Q. Broughton, Phys. Rev. B 58, R5893, 1998.
7. F.H. Stillinger and T.A. Weber, Phys. Rev. B 31, 5262, 1985.
8. A. Nakano, et al, Phys. Rev. B 49, 9441, 1994.
9. F.F. Abraham, J.Q. Broughton, N. Bernstein and E. Kaxiras, Europhys. Lett. 44, 783, 1998; Comput. in Phys. 12, 538, 1998.
10. F.F. Abraham, J.Q. Broughton, N. Bernstein and E. Kaxiras, Europhys. Lett. 44, 783, 1998; Comput. in Phys. 12, 538, 1998.
11. O.C. Zienkiewicz and R.L. Taylor, The Finite Element Method, 4th ed., McGraw-Hill, 1991.
12. W.H. Press, et al, Numerical Recipes in FORTRAN, 2nd ed., Cambridge Univ. Press, 1992.
13. J.Q. Broughton, et al, Phys. Rev. B 56, 611, 1997.
14. R.E. Rudd, in preparation.