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Volumn 90, Issue 7, 2001, Pages 3642-3644

Nitrogen effect on self-interstitial generation in Czochralski silicon revealed by gold diffusion experiments

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EID: 0035477874 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1401795 Document Type: Article

Times cited : (12)

References (15)

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